@inproceedings{worsey_fully_2023,
	location = {Munich, Germany},
	title = {Fully Microelectromechanical Non-Volatile Memory Cell},
	isbn = {978-1-66549-308-6},
	url = {https://ieeexplore.ieee.org/document/10052290/},
	doi = {10.1109/MEMS49605.2023.10052290},
	eventtitle = {2023 {IEEE} 36th International Conference on Micro Electro Mechanical Systems ({MEMS})},
	pages = {507--510},
	booktitle = {2023 {IEEE} 36th International Conference on Micro Electro Mechanical Systems ({MEMS})},
	publisher = {{IEEE}},
	author = {Worsey, Elliott and Kulsreshath, Mukesh K. and Tang, Qi and Pamunuwa, Dinesh},
	urldate = {2023-04-04},
	date = {2023-01-15},
}